APOGEE OPTOCOM Co.,Ltd

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Thin Film Analyzer(ACMS)

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製品仕様

ACMS
Film thickness range 10 nm-25 um
Wavelength range 450-1000 nm,1000-1600 nm
spectrum resolution ~1 nm
spectrum repeatability <0.03%
Thickness error in multilayer film <2nm
Thickness precision in multilayer film <0.1 nm
refractive index error <0.1
Sample size 1"~8"
Test items
 
Single layer optical properties of Organic polymer materials, Metal, Oxide, Nitride, Semiconductors, Dielectric material
1. Refractive index(n)
2. Extinction coefficient(k)
3. Film thickness(d)
4. Spectrum of Transmittance
5. Spectrum of Reflectivity
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